Influence of Xe+-ion irradiation on the microstructure of diamond-like carbon films

Vacuum

Volumn 62, Issue 1, 2001, Pages 15-19

  Faizrakhmanov, I A ^a   Bazarov, V V ^a   Zhikharev, V A ^a   Stepanov, A L ^b   Khaibullin, I B ^a  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

^b UNIVERSITY HOSPITAL RWTH AACHEN   (Germany)

Author keywords

Diamond like carbon; Implantation; Optical and electrical properties

Indexed keywords

DIAMOND LIKE CARBON FILMS; ELECTRIC PROPERTIES; ION BEAMS; ION BOMBARDMENT; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; POSITIVE IONS; XENON;

DEFECT ACCUMULATION;

CARBON FIBERS;

EID: 0035947412     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00460-7     Document Type: Article

References (4)

1. Faizrakhmanov I., Bazarov V., Zhikharev V., Khaibullin I. Nucl Instr and Meth B. 127/128:1997;719-722.
2. Faizrakhmanov I., Bazarov V., Zhikharev V., Khaibullin I. Nucl Instr and Meth B. 148:1999;669-672.
3. Faizrakhmanov I, Bazarov V, Zhikharev V, Khaibullin I, Semiconductors, 2001, in press.
4. Robertson J. Adv Phys. 35:1986;317-374.