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Volumn 148, Issue 1-4, 1999, Pages 669-672

The investigation of optical and electrical properties of N+-implanted amorphous diamond-like carbon (DLC) films

Author keywords

Diamond like carbon; Implantation; Optical and electrical properties

Indexed keywords

AMORPHOUS FILMS; ELECTRIC PROPERTIES; FILM GROWTH; ION IMPLANTATION; MOLECULAR STRUCTURE; NITRIDES; NITROGEN; OPTICAL PROPERTIES;

EID: 0033513920     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00856-8     Document Type: Article
Times cited : (7)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.