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Volumn 148, Issue 1-4, 1999, Pages 669-672
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The investigation of optical and electrical properties of N+-implanted amorphous diamond-like carbon (DLC) films
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Author keywords
Diamond like carbon; Implantation; Optical and electrical properties
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Indexed keywords
AMORPHOUS FILMS;
ELECTRIC PROPERTIES;
FILM GROWTH;
ION IMPLANTATION;
MOLECULAR STRUCTURE;
NITRIDES;
NITROGEN;
OPTICAL PROPERTIES;
CARBON NITRIDE;
DIAMOND FILMS;
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EID: 0033513920
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(98)00856-8 Document Type: Article |
Times cited : (7)
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References (5)
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