SIMS detection in the 1012 atoms cm-3 range

Surface and Interface Analysis

Volumn 25, Issue 10, 1997, Pages 737-740

  Gnaser, Hubert ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Detection limits; SIMS; Te doped GaAs

Indexed keywords

ATOMS; IONIZATION; IONS; SEMICONDUCTING GALLIUM ARSENIDE; SPUTTERING;

DETECTION LIMIT; MASS INTERFERENCE;

SECONDARY ION MASS SPECTROMETRY;

EID: 0031238137     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199709)25:10<737::AID-SIA294>3.0.CO;2-M     Document Type: Article

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