Nanostructuring with a high current isotope separator and ion implanter

Applied Surface Science

Volumn 182, Issue 3-4, 2001, Pages 313-320

  Chini, T K ^a   Datta, D ^a   Bhattacharyya, S R ^a   Sanyal, M K ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Ar bombardment; Ion implanter; Nanoparticles

Indexed keywords

ARGON; ELECTRIC CURRENTS; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; ISOTOPES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON;

HIGH CURRENT ISOTOPE SEPARATORS;

NANOSTRUCTURED MATERIALS;

EID: 0035935545     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00420-2     Document Type: Article

References (20)