Characterisation of nitride thin films by electron backscattered diffraction

Materials Science and Engineering: B

Volumn 82, Issue 1-3, 2001, Pages 19-21

  Trager Cowan, C ^a   Manson Smith, S K ^a   Cowan, D A ^a   Sweeney, F ^a   McColl, D ^a   Mohammed, A ^a   Timm, R ^a   Middleton, P G ^a   O'Donnell, K P ^a   Zubia, D ^b   Hersee, S D ^b  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^b UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

Diffraction; Electron backscattered diffraction (EBSD); GaN; Kikuchi; Nitrides

Indexed keywords

ELECTRON DIFFRACTION; ELECTRON SCATTERING; NITRIDES; SAPPHIRE; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS;

ELECTRON BACKSCATTERED DIFFRACTION (EBSD); KIKUCHI THEORY;

SEMICONDUCTING FILMS;

EID: 0035933090     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00791-1     Document Type: Article

References (9)