In situ monitoring of the effects of gas mixtures on ion beam depositions of diamond-like carbon films

Materials Research Society Symposium - Proceedings

Volumn 502, Issue , 1998, Pages 263-268

  Wu, R L C ^a   Lanter, W ^a   Monreal, R ^a   Kosel, P B ^a   Miyoshi, K ^a  

^a K Systems Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; FILM GROWTH; FRICTION; ION BEAMS; IONS; MOLECULES; OPTICAL PROPERTIES; OXYGEN; RAMAN SCATTERING; SUBSTRATES; WEAR OF MATERIALS;

DIAMOND LIKE CARBON FILM; ION BEAM DEPOSITION;

MASS SPECTROMETRY;

EID: 0031640221     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)