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Volumn 80, Issue 1-3, 2001, Pages 99-103
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Kinetics of native oxide film growth on epiready GaAs
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Author keywords
GaAs wafers; Kinetics; Native oxide; X ray reflectivity
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Indexed keywords
CHEMICAL POLISHING;
COMPUTER SIMULATION;
LIGHT ABSORPTION;
LIGHT REFLECTION;
METALLORGANIC VAPOR PHASE EPITAXY;
REACTION KINETICS;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR GROWTH;
GRAZING INCIDENCE X RAY REFLECTIVITY;
SURFACE PHOTOABSORPTION;
SEMICONDUCTING FILMS;
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EID: 0035932251
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(00)00622-X Document Type: Article |
Times cited : (13)
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References (11)
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