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Volumn 80, Issue 1-3, 2001, Pages 99-103

Kinetics of native oxide film growth on epiready GaAs

Author keywords

GaAs wafers; Kinetics; Native oxide; X ray reflectivity

Indexed keywords

CHEMICAL POLISHING; COMPUTER SIMULATION; LIGHT ABSORPTION; LIGHT REFLECTION; METALLORGANIC VAPOR PHASE EPITAXY; REACTION KINETICS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH;

EID: 0035932251     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00622-X     Document Type: Article
Times cited : (13)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.