Soft X-ray reflectivity and structure evaluation of CoCr/C multilayer X-ray mirrors for spectral region around 6 nm

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 467-468, Issue , 2001, Pages 337-340

  Takenaka, H ^a   Nagai, K ^a   Ito, H ^a   Muramatsu, Y ^b   Kawamura, T ^c   Gullikson, E ^d   Perera, R C C ^d  

^a NTT Advance Technology Corporation   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c NTT Basic Research Laboratories   (Japan)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

CoCr C; Multilayer; Reflectivity; Thermal annealing; X ray mirror

Indexed keywords

ANNEALING; LIGHT REFLECTION; MAGNETRON SPUTTERING; MULTILAYERS; OPTICAL FILMS; PHOTOEMISSION; X RAY OPTICS;

X RAY REFLECTIVITY;

MIRRORS;

EID: 0035928247     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)00319-9     Document Type: Conference Paper

References (9)