Electrical transients in the ion-beam-induced nitridation of silicon

Applied Physics Letters

Volumn 78, Issue 22, 2001, Pages 3445-3447

  Petravic, Mladen ^a   Deenapanray, Prakash N K ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035926671     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1376661     Document Type: Article

References (12)

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2. J. S. Williams, M. Petravic, B. G. Svensson, and M. Conway, J. Appl. Phys. 76, 1840 (1994).
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4. W. De Coster, B. Brijs, H. Bender, J. Alay, and W. Vandervorst, Vacuum 45, 389 (1994).
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6. P. N. K. Deenapanray and M. Petravic (unpublished).
7. J. F. Zigler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1986). Vol. 1.
8. C. D. Meekison, G. R. Booker, K. J. Reeson, P. L. F. Hemmenet, R. F. Peart, R. J. Chater, J. A. Kilner, and J. R. Davis, J. Appl. Phys. 69, 3503 (1991).
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12. See, for example, P. O. A. L. Davies, An Introduction to Dynamic Analysis and Automatic Control (Wiley, New York, 1965), p. 111.