Effect of deposition temperature on the morphology structure, surface chemistry and mechanical properties of magnetron sputtered Ti70-Al30 thin films on steel substrate

Surface and Coatings Technology

Volumn 141, Issue 2-3, 2001, Pages 252-261

  Kale, A ^a   Seal, S ^a   Sobczak, N ^b   Morgiel, J ^c   Sundaram, K B ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Lukasiewicz Research Network Krakow Institute of Technology   (Poland)

^c INSTITUTE OF METALLURGY AND MATERIALS SCIENCE   (Poland)

Author keywords

Growth models; Microhardness; Nanoclusters; Plasma vapor deposition; Transmission electron microscopy; Vickers hardness; X Ray photoelectron spectroscopy

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; SURFACE CHEMISTRY; TITANIUM ALLOYS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM STRUCTURE;

THIN FILMS;

TEMPERATURE EFFECT;

EID: 0035907502     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01268-3     Document Type: Article

References (35)