Growth of GaAs quantum dots on Si substrate with artificial topography by ion sputtering

Scripta Materialia

Volumn 44, Issue 8-9, 2001, Pages 1945-1948

  Li, G ^a   Zhang, J ^a   Yang, L ^a   Zhang, Y ^a   Zhang, L ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (China)

Author keywords

AFM; Quantum dot; Semiconductor; Sputtering

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SPUTTERING; SUBSTRATES;

RIPPLE NANOPATTERNS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0035906769     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(01)00818-1     Document Type: Article

References (13)