Ion-sputter-modification of metal targets

Vacuum

Volumn 63, Issue 4, 2001, Pages 597-601

  Wilk, J ^a   Przybylski, G ^a   Kowalski, Z W ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Ion beam; Ion sputtering; Stainless steel; Surface morphology; Surface roughness; Tantalum; Titanium

Indexed keywords

ION BEAMS; ION BOMBARDMENT; SPUTTERING; SURFACE PROPERTIES; SURFACE ROUGHNESS;

ION SPUTTERING; METAL TARGETS;

POLYCRYSTALLINE MATERIALS;

EID: 0035899378     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00246-9     Document Type: Conference Paper

References (14)

1. Ion-beam modification of surface roughness of polycrystalline materials (thesis)