Fabrication of poly-Si thick films by electrophoretic deposition

Electronics Letters

Volumn 37, Issue 17, 2001, Pages 1090-1092

  Hossein Babaei, F ^a   Raissi Dehkordi, B ^b  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

^b MATERIALS AND ENERGY RESEARCH CENTER   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ELECTRIC FIELDS; ELECTROPHORESIS; FABRICATION; SILICON WAFERS; THICK FILMS;

ELECTROPHORETIC DEPOSITION; POLY-SILICON THICK FILMS;

SEMICONDUCTING SILICON;

EID: 0035899207     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20010723     Document Type: Article

References (10)

1. Electrophoretic fabrication of positive electrodes for rechargeable lithium batteries
2. Electrophoretic deposition forming of nickel-coated-carbon-fiber-reinforced borosilicate-glass-matrix composites
3. Electrophoretic deposition [EPD] applied to reaction joining of silicon carbide and silicon nitride ceramics
4. Electrophoretic deposition of ceramic materials for fuel cell applications
5. Electrophoresis of CdS particles in acetone
6. Electrophoretic deposition of MgO thick film from an acetone suspension
7. Impurity dependence of electrophoretic mobility in MgO/acetone cell
8. Formation of a deposit by electrophoresis
9. Electrophoretic deposition forming of SiC-TZP composites in nonaqueous sol media
10. Electrophoretically deposited zinc oxide thick film gas sensors