Investigation of the structure and properties of a-C:H coatings with metal and silicon containing interlayers

Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 122-128

  Nothe M ^a   Breuer, U ^a   Koch, F ^b   Penkalla, H J ^a   Rehbach, W P ^c   Bolt, H ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

a C:H; Adhesion; Graded coating; Metal interlayer; Silicon containing interlayers

Indexed keywords

CARBON; CHEMICAL BONDS; DEPOSITION; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

HARD CARBON COATINGS;

PROTECTIVE COATINGS;

EID: 0035898760     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00274-4     Document Type: Article

References (10)