Channeling on boron clusters in silicon

Journal of Applied Physics

Volumn 90, Issue 10, 2001, Pages 5032-5037

  Selen, L J M ^a   Van Ijzendoorn, L J ^a   Van Loon, A ^a   De Voigt, M J A ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035890735     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1406968     Document Type: Article

References (14)

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