A multifunctional silicon-based microscale surgical system

Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 351-356

  Son, Il Seok ^a   Lal, Amit ^a   Hubbard, Bill ^b   Olsen, Tim ^b  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

Bulk micromachined; Piezoresistive sensors; Silicon nitride metal blades; Silicon based surgical tool; Ultrasonic strain; Ultrasonic transducers

Indexed keywords

MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PROBES; SEMICONDUCTING SILICON; SILICON SENSORS; ULTRASONIC TRANSDUCERS; CHEMICAL VAPOR DEPOSITION; ELECTRON DEVICE MANUFACTURE; FORCE MEASUREMENT; PLATINUM; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; STRAIN MEASUREMENT; SURGERY; THIN FILMS;

MICROSCALE SURGICAL SYSTEM; MULTIFUNCTIONAL SILICON; PIEZORESISTIVE SENSORS; ULTRASONIC STRAIN; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; SILICON-BASED SURGICAL TOOLS; TETRA-METHYL AMMONIUM HYDROXIDE; WHEATSTONE CONFIGURATION;

SURGICAL EQUIPMENT; BIOSENSORS;

EID: 0035878601     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00607-0     Document Type: Article

References (8)

1. Micromachined silicon ultrasonic needle
2. Strength characterization of silicon miroprobes in neurophysiological tissues
3. Characteristics of polysilicon layers and their application in sensors
4. Optimization of the silicon/PZT longitudinal mode resonant transducer