Optimization of the silicon/PZT longitudinal mode resonant transducer

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 61-67

  Lal, Amit ^a   White, Richard M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE MEASUREMENT; MATHEMATICAL MODELS; OPTIMIZATION; ULTRASONIC TRANSDUCERS;

LONGITUDINAL MODE RESONANT TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031356850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (19)

1. Guo, W., Low, T. S., 1995, "Modeling of a three-layer piezoelectric bimorph beam with hysteresis," J. Microelectromechanical Systems, vol. 4, no. 4, pp. 230-237.
2. Graff, K. R, 1975, Wave Motion in Elastic Solids, Dover Publishers, New York, N. Y.
3. Holland, R., 1967, "Representation of dielectric, elastic, and piezoelectric losses by complex coefficients," IEEE Trans. Sonics and Ultrasonics, SU-14, pp. 18-20.
4. Ikeda, T., 1990, Fundamentals of Piezoelectricity, Oxford University Press, Oxford; New York.
5. Kerr, A. D., 1964, "Elastic and viscoelastic foundation models," J. Appl. Mech., vol. 31, pp. 491-498.
6. Kim, E.S., et al., 1996, "Micromachined acoustic-wave liquid ejector," IEEE Workshop on Solid State Sensors and Actuators, Hilton Head 1996. pp. 280-282.
7. Lal, A., White, R. M., 1996, "Ultrasonically driven silicon atomizer and pump," IEEE Workshop on Solid State Sensors and Actuators 1996, Hilton Head.
8. Lal, A., White, R. M., 1994, "Silicon micromachined ultrasonic microcutter," IEEE Ultrasonics Symposium, Nov. 1-4, Cannes, France.
9. Mentel, T.J., 1964, "Viscoelastic boundary damping of beams and plates," J. Appl. Mech., vol. 31, pp. 61-71.
10. Moroney, R., 1995, Ultrasonic Microtransport, Ph. D. dissertation, U. C. Berkeley.
11. Neppiras, E.A., 1973, "The pre-stressed piezoelectric sandwich transducer," Ultrasonics International 1973, pp. 295-302.
12. Rao, M. D., He, S., 1992a, "Vibration analysis of adhesively bonded lap joint, Part 1: Theory," J. Sound and Vibration, vol. 152 (3), pp. 405-416.
13. Rao, M. D., He, S., 1992b, "Vibration analysis of adhesively bonded lap joint, Part 2: Experiments," J. Sound and Vibration, vol. 152 (3), pp. 417-425.
14. Saito, H., Tani, H., 1984, "Vibrations of bonded beams with a single lap adhesive joint," J. Sound and Vibration, vol. 92, no. 2, pp. 299-309.
15. Smits, J. G., Choi, W., 1991, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Sonics and Ultrasonics, vol. 38, no. 3.
16. Suslick, K.S., 1988, ULTRASOUND- Its Chemical, Physical and Biological Effects, VCH Publishers, New York, N. Y.
17. Tsou, H. S., 1993, Piezoelectric Shells: Distributed Sensing and Control of Continua, Kluwer Academic, Boston.
18. Woolett, R.S., 1968, "Power limitations of sonic transducers," IEEE Trans. Sonics and Ultrasonics, SU-15, pp. 218-228.
19. Yang, C., Pang, S., 1993, "Stress-strain analysis of adhesive" bonded single-lap composite joints under cylindrical bending," Composites Engineering, vol. 3, no. 11, pp. 1051-1063.