Microreactors and microfluidic systems: An innovative approach to gas sensing using tin oxide-based gas sensors

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 48-54

  Becker, Th ^a   Muhlberger S ^a   Bosch v Braunmuhl C ^a   Muller G ^a   Meckes, A ^b   Benecke, W ^b  

^a DAIMLER AG   (Germany)

^b UNIVERSITY OF BREMEN   (Germany)

Author keywords

Microchamber; Microfluidic system; Microreactor; Tin oxide gas sensor

Indexed keywords

MICROMACHINING; PUMPS; TIN COMPOUNDS; VALVES (MECHANICAL);

MICROFLUIDIC SYSTEMS; MICROREACTORS;

CHEMICAL SENSORS;

EID: 0035876316     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00671-2     Document Type: Article

References (8)

1. Comparison of tin oxide-based thick- and thin-film sensor elements deposited on micromachined and ceramic substrates
2. Ozone detection using low-power-consumption metal-oxide gas sensors, E-MRS Spring Meeting 1998
3. Air pollution monitoring using tin oxide based microreactor systems
4. 2-surfaces
5. Microfluidic system for the integration and cyclic operation of gas sensors
6. Silicon micromachining technology for heated gas sensor elements