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Volumn 302, Issue 1, 2001, Pages 128-134
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Surface treatment of tantalum to improve its corrosion resistance
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Author keywords
Corrosion resistance; Radio frequency; Tantalum
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Indexed keywords
ARGON;
CARBON;
CHEMICAL VAPOR DEPOSITION;
CORROSION RESISTANCE;
DIFFUSION;
HYDROGEN;
METHANE;
PLASMAS;
SURFACE PROPERTIES;
PLASMA TECHNIQUES;
TANTALUM CARBIDE;
CORROSION RESISTANCE;
SURFACE TREATMENT;
TANTALUM;
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EID: 0035871428
PISSN: 09215093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5093(00)01364-2 Document Type: Article |
Times cited : (33)
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References (18)
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