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Volumn 302, Issue 1, 2001, Pages 128-134

Surface treatment of tantalum to improve its corrosion resistance

Author keywords

Corrosion resistance; Radio frequency; Tantalum

Indexed keywords

ARGON; CARBON; CHEMICAL VAPOR DEPOSITION; CORROSION RESISTANCE; DIFFUSION; HYDROGEN; METHANE; PLASMAS; SURFACE PROPERTIES;

EID: 0035871428     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)01364-2     Document Type: Article
Times cited : (33)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.