Determination of processing damage in thin polycrystalline Ir films using Bragg-peak fringe analysis

Journal of Applied Physics

Volumn 89, Issue 6, 2001, Pages 3125-3131

  Saenger, K L ^a   Noyan, I C ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035868180     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1346660     Document Type: Article

References (10)

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4. ∫ term is zero.
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9. Film texture was further checked with an area detector on a Siemens GADDS system. It was found that the as-deposited film did have texture, albeit much less that of the annealed film. Further analysis of these film textures will be reported separately.
10. K. L. Saenger and D. A. Neumayer, J. Appl. Phys, 89, 3132 (2001).