Electron-stimulated desorption from the products of chemisorption of trifluorochloroethene on silicon

International Journal of Mass Spectrometry

Volumn 205, Issue 1-3, 2001, Pages 293-298

  Cooper, Gregory D ^a   Sanabia, Jason E ^b   Orloff, Jon ^c   Moore, John H ^a  

^a University of Maryland   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

Electron stimulated desorption

Indexed keywords

CHLORINE; CHLOROETHANE; FLUORINE; SILICON; TRIFLUOROCHLOROETHENE; UNCLASSIFIED DRUG;

ANALYTIC METHOD; ARTICLE; CHEMICAL COMPOSITION; DESORPTION; DISSOCIATION; ELECTRON; ELECTRON BEAM; IONIZATION; TEMPERATURE;

EID: 0035864915     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1387-3806(00)00278-5     Document Type: Article

References (10)