Thermal and electron driven chemistry of CCl4 on oxidized Si(100)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3328-3334

  Junker, K H ^a   White, J M ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032335989     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581540     Document Type: Article

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