Emission spectroscopy of Ar-H2 plasma

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 409-412

  Monna, V ^a   Ricard, A ^a  

^a CNRS   (France)

Author keywords

Hydrogen dissociation; Microwave discharges; Plasma kinetics; Plasma spectroscopy

Indexed keywords

ATOMS; EMISSION SPECTROSCOPY; GLOW DISCHARGES;

PLASMA SPECTROSCOPY;

PLASMA DENSITY;

EID: 0035858597     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00137-3     Document Type: Conference Paper

References (3)

1. Hassouni K, Farhat S, Scott CD, Gicquel A. J Phys III 1996;6:1229.
2. Gaillard M, Raynaud P, Ricard A. Plasmas Polym 1999;4:243.
3. Mozetic M, Drobnic M. Vacuum 1998;50:319.