Codeposition of SiC and C from mixtures of Methyltrichlorosilane and ethylene in hydrogen

Industrial and Engineering Chemistry Research

Volumn 40, Issue 12, 2001, Pages 2586-2596

  Kostjuhin, I M ^a   Sotirchos, S V ^a,b  

^a University of Rochester   (United States)

^b INSTITUTE OF CHEMICAL ENGINEERING SCIENCES   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; COMPOSITION; ETHYLENE; GRAVIMETRIC ANALYSIS; SILICON COMPOUNDS;

STEADY STATES;

CARBON;

CARBON; ETHYLENE DERIVATIVE; HYDROGEN; METHYLTRICHLOROSILANE; SILANE DERIVATIVE; SILICON; UNCLASSIFIED DRUG;

CARBON; DEPOSITION; SILICON CARBIDE;

ARTICLE; CHEMICAL REACTION KINETICS; FILM; FLOW RATE; MATERIAL STATE; PRESSURE; REACTOR; SCANNING ELECTRON MICROSCOPY; STEADY STATE; TEMPERATURE; VAPOR; X RAY DIFFRACTION;

EID: 0035853886     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie000960u     Document Type: Article

References (39)

1. Chemical vapor deposition of silicon carbide
2. Growth mechanism of silicon carbide films by chemical vapor deposition below 1273 K
3. 2
4. An experimental study of β-SiC epitaxial film growth in a horizontal chemical vapor deposition reactor
5. 3 as a source gas
6. Comparison of the pyrolysis products of dichlorodimethylsilane in the chemical vapor deposition of silicon carbide on silica in hydrogen or argon
7. Synthesis and properties of new composite materials for high-temperature applications based on carbon fibers and C-SiC or C-TiC hybrid matrixes
8. Depletion effects of silicon carbide deposition from methyltrichlorosilane
9. 2 in a vertical tubular hot-wall reactor
10. Transparent chemical vapor deposited β-SiC
11. Gravimetric investigation of the deposition of SiC films through decomposition of methyltrichlorosilane
12. Experimental study of atmospheric pressure chemical vapor deposition of SiC from MTS
13. Improving breakdown voltage of SiC/Si heterojunction with graded structure by rapid thermal CVD technology
14. Carbon-fiber-reinforced composites with graded carbon-silicon carbide matrix composition
15. 1-x ceramic layers
16. Investigation on the properties of carbon fiber with C-Si functionally graded coating
17. The control of high-temperature corrosion of engineering carbons and graphites
18. Functionally gradient materials and nanocomposites
19. Carbon/carbon composites coated with SiC/C functionally gradient materials
20. Thermal response experiments of SiC/C and TiC/C functionally gradient materials as plasma-facing materials for fusion applications
21. Chemical vapor infiltration and deposition to produce a silicon carbide-carbon functionally gradient material
22. 4 + SiC)/C layer for the oxidation protection of carbon-carbon composites
23. Thermal fatigue resistance of CVD SiC/C functionally gradient material
24. Effect of source gas composition on the synthesis of SiC/C functionally gradient materials by CVD
25. 1-x
26. CVD of SiC in large coating vessels
27. 2 gas precursor
28. The decomposition of methyltrichlorosilane in hydrogen and helium
29. FTIR in situ studies of the gas-phase reactions in chemical vapor deposition of SiC
30. On the homogeneous chemistry of the thermal decomposition of MTS. Thermodynamic analysis and kinetic modeling
31. Heterogeneous kinetics of the chemical vapor deposition of silicon carbide from methyltrichlorosilane
32. Rate of SiC deposition from methyltrichlorosilane and influence of HCl addition
33. 2 system
34. Effect of reactant depletion on the microstructure and preferred orientation of polycrystalline SiC films by chemical vapor deposition
35. Steady-state multiplicity phenomena in the deposition of SiC
36. Hydrogen chloride effects on the chemical vapor deposition of SiC from MTS