Laser CVD of cubic SiC nanocrystals

Applied Surface Science

Volumn 184, Issue 1-4, 2001, Pages 118-122

  Kamlag, Y ^a,b   Goossens, A ^b   Colbeck, I ^a   Schoonman, J ^b  

^a UNIVERSITY OF ESSEX   (United Kingdom)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Laser CVD; Nanocrystals; Silicon carbide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; LASER BEAMS; PARTICLE SIZE ANALYSIS; SILICON CARBIDE;

INFRARED EXCITATION;

NANOSTRUCTURED MATERIALS;

EID: 0035852170     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00486-X     Document Type: Article

References (15)