Flat electromagnetic pressure sensor for harsh environments

Sensors and Actuators, A: Physical

Volumn 91, Issue 1-2, 2001, Pages 51-56

  Dutoit, B M ^a   Pilloud, Y ^a   Elegibili, F ^a   Besse, P A ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

Eddy current; Electromagnetic; Feed back; Force compensation; Harsh environment; Pressure sensor

Indexed keywords

CORROSION RESISTANCE; EDDY CURRENTS; ELECTROMAGNETISM; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE TESTING; STAINLESS STEEL; STANDARDS;

FORCE COMPENSATION; HARSH ENVIRONMENT; PRESSURE SENSOR;

SILICON SENSORS;

EID: 0035811375     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00508-8     Document Type: Article

References (4)