Nucleation and growth kinetics of AIN films on atomically smooth 6H-SiC (0001) surfaces

Applied Physics Letters

Volumn 78, Issue 23, 2001, Pages 3612-3614

  Yamada, Satoshi ^a   Kato, Jun Ichi ^a   Tanaka, Satoru ^a   Suemune, Ikuo ^a   Avramescu, Adrian ^b   Aoyagi, Yoshinobu ^b   Teraguchi, Nobuaki ^c   Suzuki, Akira ^c  

^a HOKKAIDO UNIVERSITY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035806183     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1377309     Document Type: Article

References (11)

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