Hot-wire CVD growth simulation for thickness uniformity

Thin Solid Films

Volumn 395, Issue 1-2, 2001, Pages 66-70

  Sali, Jaydeep V ^a   Patil, S B ^b   Jadkar, S R ^b   Takwale, M G ^b  

^a SWAMI RAMANAND TEERTH MARATHWADA UNIVERSITY   (India)

^b UNIVERSITY OF PUNE   (India)

Author keywords

Chemical vapor deposition; Computer simulation; Solar cells; Thickness uniformity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FILM GROWTH; SUBSTRATES; THICKNESS CONTROL;

THICKNESS UNIFORMITY;

THIN FILMS;

EID: 0035801048     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01209-3     Document Type: Conference Paper

References (5)