Chemical vapor deposition of nickel oxide films from Ni(C5H5)2/O2

Thin Solid Films

Volumn 391, Issue 1, 2001, Pages 57-61

  Kang, Jin Kyu ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Diagnostics of gas phase reaction; Metal organic chemical vapor deposition; Ni(C5H5)2; Nickel oxide film

Indexed keywords

CRYSTAL ORIENTATION; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; NICKEL COMPOUNDS; OXIDATION;

GAS PHASE REACTIONS; NICKEL OXIDE FILMS;

MAGNETIC FILMS;

EID: 0035797062     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00962-2     Document Type: Article

References (15)