|
Volumn 46, Issue 13-14, 2001, Pages 1931-1936
|
Roll-to-roll pulsed dc magnetron sputtering deposition of WO3 for electrochromic windows
|
Author keywords
Electrochromism; Flexible substrate; Pulsed dc; Reactive sputtering; Tungsten oxide
|
Indexed keywords
ARGON;
COLOR;
ELECTROCHROMISM;
ELECTRODEPOSITION;
ELLIPSOMETRY;
MAGNETRON SPUTTERING;
OXYGEN;
PARTIAL PRESSURE;
PLASMA APPLICATIONS;
PRESSURE EFFECTS;
REFRACTIVE INDEX;
SPUTTER DEPOSITION;
TRANSMISSION ELECTRON MICROSCOPY;
TUNGSTEN COMPOUNDS;
ROLL-TO-ROLL PULSED MAGNETRON SPUTTERING;
TUNGSTEN TRIOXIDE;
OPTICAL FILMS;
|
EID: 0035794563
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/S0013-4686(01)00362-0 Document Type: Article |
Times cited : (59)
|
References (18)
|