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Volumn 56, Issue 3-4, 1999, Pages 259-269
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Analysis of the influence of the gas pressure during the deposition of electrochromic WO3 films by reactive r.f. sputtering of W and WO3 target
c
Isoclima SpA
(Italy)
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Author keywords
Deposition; Electrochromic WO3 films; Gas pressure; Sputtering
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Indexed keywords
CERAMIC MATERIALS;
DIFFUSION IN SOLIDS;
ELECTROCHROMISM;
ELECTROLYTES;
LITHIUM;
MORPHOLOGY;
OPTICAL PROPERTIES;
POROSITY;
PRESSURE EFFECTS;
SPUTTER DEPOSITION;
TUNGSTEN;
TUNGSTEN COMPOUNDS;
ELECTROCHROMIC DEVICES;
TUNGSTEN TRIOXIDE;
ELECTROOPTICAL MATERIALS;
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EID: 0032713791
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(98)00136-6 Document Type: Article |
Times cited : (23)
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References (15)
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