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Volumn 56, Issue 3-4, 1999, Pages 259-269

Analysis of the influence of the gas pressure during the deposition of electrochromic WO3 films by reactive r.f. sputtering of W and WO3 target

Author keywords

Deposition; Electrochromic WO3 films; Gas pressure; Sputtering

Indexed keywords

CERAMIC MATERIALS; DIFFUSION IN SOLIDS; ELECTROCHROMISM; ELECTROLYTES; LITHIUM; MORPHOLOGY; OPTICAL PROPERTIES; POROSITY; PRESSURE EFFECTS; SPUTTER DEPOSITION; TUNGSTEN; TUNGSTEN COMPOUNDS;

EID: 0032713791     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(98)00136-6     Document Type: Article
Times cited : (23)

References (15)
  • 15


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.