Low turn-on voltage silicon field emitter arrays with atomically sharp tips

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 2001, Pages 113-114

  Ding, Meng ^a   Akinwande, Akintunde I ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRON EMISSION; ETCHING; GATES (TRANSISTOR); LOW TEMPERATURE EFFECTS; OXIDATION; SEMICONDUCTING SILICON;

GATE-APERTURE; LOW TEMPERATURE OXIDATION SHARPENING; SILICON FIELD EMITTER ARRAYS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035786465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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