Materials deposition and emission characteristics of NbC/Nb field emitter array cathodes

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 2001, Pages 97-98

  Mackie, W A ^a   Cabe, G L ^a   Southall, L A ^a   Xie, Tianbao ^a   McClelland, P H ^b  

^a Applied Physics Technologies Inc   (United States)

^b HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; OXYGEN; PRESSURE; TITANIUM NITRIDE;

FIELD EMITTER ARRAY CATHODES; MATERIALS DEPOSITION; SPINDT PROCESS;

FIELD EMISSION CATHODES;

EID: 0035784892     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. F.M. Charbonnier, W.A. Mackie, R.L. Hartman, and Tianbao Xie, JVSTB 19(3), (2001).
2. W. A. Mackie, Tianbao Xie, M.R. Matthews, B.R. Routh, Jr., P. R. Davis, JVSTB, 16 (4), 2057-62 (1998).
3. W.A. Mackie and P.R. Davis, IEEE - Trans. on Electron Devices, vol. 36 (1), (1989).