Low-field electron emission of Si micro-tip arrays produced by laser beam evaporation

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 2001, Pages 115-116

  Karabutov, A V ^a   Frolov, V D ^a   Simakin, A V ^a   Shafeev, G A ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; CURRENT VOLTAGE CHARACTERISTICS; EVAPORATION; LASER ABLATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACE PROPERTIES; SURFACE STRUCTURE;

EMISSION CENTERS; FIELD ELECTRON EMISSION; LASER BEAM EVAPORATION; LASER RADIATION; MICRO-TIP ARRAYS; SCANNING TUNNEL FIELD EMISSION MICROSCOPE; SURFACE REFLECTIVITY;

ELECTRON EMISSION;

EID: 0035784238     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. F. Sánchez, J.L. Morenza, R. Aguiar, J.C. Delgado, M. Varela, Appl. Phys. A66 (1998) 83.
2. S.I. Dolgaev, S.V. Lavrischev, A.A. Lyalin, A.V. Simakin, V.V. Voronov, and G.A. Shafeev, Physics of Vibrations, 3 (1999) 231.
3. V.D. Frolov, A.V. Karabutov, S. M. Pimenov, E.D. Obraztova, and V.I. Konov, Ultramicroscopy, 79 (1999) 209.