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Volumn , Issue , 2001, Pages 825-828

Understanding and optimisation of PDPs from diagnostics and models

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; MAGNESIA; PHOTOEMISSION; PLASMA DIAGNOSTICS; SPUTTER DEPOSITION;

EID: 0035782946     PISSN: 10831312     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (10)

References (9)
  • 5
    • 0000334435 scopus 로고    scopus 로고
    • Dec.
    • R. Ganter et al., to be published in Journal of the SID, Dec. 2001; Th. Callegari R. Ganter, and J.P. Boeuf, J. Appl. Phys. 88, 3905 (2000).
    • (2001) Journal of the SID
    • Ganter, R.1
  • 7
    • 0011884790 scopus 로고    scopus 로고
    • unpublished results (2001)
    • C. Macé et al., unpublished results (2001).
    • Macé, C.1
  • 8
    • 0011843332 scopus 로고    scopus 로고
    • United States Patent 6184848B1
    • L. Weber, United States Patent 6184848B1 (2001).
    • (2001)
    • Weber, L.1
  • 9
    • 0011844172 scopus 로고    scopus 로고
    • SIPDP-AC, Kinema Software, http://www.siglo-kinema.com.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.