Energy distribution of ions and fast neutrals in microdischarges for display technology

Journal of Applied Physics

Volumn 88, Issue 5, 2000, Pages 2240-2245

  Hagelaar, G J M ^a   Kroesen, G M W ^a   Klein, M H ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000238297     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1287758     Document Type: Article

References (19)

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