Study of surface profile measurement using a CD optical pickup head

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4596, Issue , 2001, Pages 48-53

  Zhong, Z W ^a   Tham, W W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Measurement; Optical pickup head; Surface profile

Indexed keywords

NANOTECHNOLOGY; OPTICAL DEVICES; PHOTODETECTORS; SEMICONDUCTOR LASERS;

OPTICAL PICKUP HEADS;

SURFACE MEASUREMENT;

EID: 0035773369     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.447370     Document Type: Conference Paper

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