Integration of active materials with silicon micromachining: Applications to optical MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 292-298

  Gouy, Jean Philippe ^a   Arakawa, Yasuhiko ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

LED; MOEMS; Organic semiconductor; Silicon micromachnining

Indexed keywords

LIGHT EMITTING DIODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL DEVICES; OPTICAL SWITCHES; SEMICONDUCTING ORGANIC COMPOUNDS;

SILICON MICROMACHINING;

SILICON;

EID: 0035771153     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448979     Document Type: Conference Paper

References (11)

1. H. Fujita, H. Toshiyoshi, "Optical MEMS", IEICE Trans. on Electronics, E83C(9), Sept. 2000 pp 1427-1434.
2. A. Bohler, P. Urbach, J. Schobel, S. Dirr, H.H. Johannes, S. Wiese, D. Ammermann, W. Kowalsky, "Organic heterostructures for electronic and photonic devices" Physica E 2 (1998) pp 562-572.
3. W. Kowalsky, T. Benstein, A. Bohler, S. Dirr, H.H. Johannes, D. Metzdorf, H. Neuner, J. Schobel, P. Urbach "Organic molecular beam deposition: technology and applications in electronics and photonics", Phys. Chem. Chem. Phys., 1, Feb. 1999, pp 1719-1725.
4. R.J. Curry, W.P. Gillin, A.P. Knights, R. Gwilliam "Silicon-based organic light-emitting diode operating at a wavelength of 1.5 μm", Applied Physics Letters, Vol 77 No15, Oct.2000, pp2271-2273.
5. V. Bulovic, V.G. Kozlov, V.B. Khalfin, S.R. Forrest, "Transform-limited, narrow-linewidth lasing action in organic semiconductor microcavities", Science, Vol 279, Jan. 1998, pp553-555.
6. B. Masenelli, S. Callard, A. Gagnaire, J. Joseph, "Fabrication and characterization of organic semiconductor-based microcavities", Thin Solid Films, 364 (2000), pp 264-268.
7. G. Hadziioannou, P.F. van Hutten, "Semiconducting Polymers, Chemistry, Physics and Engineering", Wiley-VCH, 2000.
8. L.M. Leung, C.F. Kwong, C.C. Kwok, S.K. So, "Organic polymer thick film fight emitting diodes (PTF-OLED)", Displays, 21(2000) pp199-201.
9. G. Parthasarathy, C. Adachi, P.E. Burrows, S.R. Forrest, "High-efficiency transparent organic light-emitting devices", Applied Phycics Letters, Vol 76, No 15, April 2000, pp2128-2130.
10. Y. Mita, A. Tixier, S. Oshima, M. Mira, J.P. Gouy, H. Fujita, "A silicon Shadow mask with unlimitted patterns and a mechanical alignment structure by Al-delay masking process" Trans. IEE of Japan, Vol 120-E, N 7 July 2000, pp357-362.
11. J.P. Yang, T.D. Jin, P.L. Heremans, R. Hoefnagels, P. Dieltiens, F. Blockhuys, H.J. Geise, M. Van der Auweraer, G. Borghs, "White light emission from a single layer organic light emitting diode fabricating by spincoating", Chemical Physics Letters, 325, July 2000, pp251-256.