Understanding the forbidden pitch and assist feature placement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4562 II, Issue , 2001, Pages 968-979

  Shi, Xuelong ^a   Hsu, Stephen ^a   Chen, Fung ^a   Hsu, Michael ^a   Socha, Robert J ^a   Dusa, Micea ^a  

^a ASML US Inc   (United States)

Author keywords

EL; Exposure latitude; Forbidden pitch; OPE; Optical proximity effect; SB; Scattering Bar

Indexed keywords

IMAGE ANALYSIS; LIGHT INTERFERENCE; LIGHT SCATTERING; LIGHTING; OPTICAL DESIGN;

OPTICAL PROXIMITY EFFECTS (OPC);

PHOTOLITHOGRAPHY;

EID: 0035768095     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.458261     Document Type: Conference Paper

References (6)

1. Robert Socha, etc. "forbidden pitch".
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4. Emil. Wolf, Proc. Roy. Soc. A253, 349-357 (1959).
5. Michael S. Yeung, Derek Lee, Robert Lee and A.R. Neureuther, SPIE, 1927, 452-463 (1993).
6. Donis G. Flagello, Tom Milster, Alan E. Rosenbluth, J. Opt. Soc. Am. A13, 53-64 (1996).