Printing system for MEMS packaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4558, Issue , 2001, Pages 206-214

  Hayes, Donald J ^a   Cox, W Royall ^a   Wallace, David B ^a  

^a MICROFAB TECHNOLOGIES INC   (United States)

Author keywords

Ink jet; MEMS; Micro optics; Microdispensing; MOEMS

Indexed keywords

COSTS; INK; MICROOPTICS; PACKAGING; PRINTING;

INK-JET PRINTING TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

COSTS; INK; PACKAGING; PRINTING;

EID: 0035767699     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443003     Document Type: Conference Paper

References (16)

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11. W.R. Cox, T. Chen, D.W. Ussery, D.J. Hayes, Hoenigman, D.L. MacFarlane, and E. Rabonivich, "Microjet printing of anamorphic microlens arrays," SPIE Proc. 2687, pp. 89-98, 1996.
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