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Volumn 4501, Issue , 2001, Pages 135-141

La/B4C multilayer mirrors for x-rays below 190 eV

Author keywords

Boron detection; La B4C; Soft x rays; Synchrotron reflectometry; X ray multilayer mirrors; X ray spectrometry

Indexed keywords

BORON CARBIDE; FLUORESCENCE; LANTHANUM; MAGNETRON SPUTTERING; MIRRORS; REFLECTION; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY OPTICS; X RAYS;

EID: 0035765698     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448486     Document Type: Article
Times cited : (4)

References (13)
  • 1
    • 0004055759 scopus 로고
    • SPIE Optical Engineering Press, Bellingham Washington USA
    • E. Spiller, Soft X-Ray Optics, SPIE Optical Engineering Press, Bellingham Washington USA, 1994.
    • (1994) Soft X-Ray Optics
    • Spiller, E.1
  • 3
    • 84995720203 scopus 로고    scopus 로고
    • Product information of Bruker AXS and Philips AXR
    • Product information of Bruker AXS and Philips AXR.
  • 4
    • 0027795351 scopus 로고
    • Multilayer mirror technology for soft x-ray projection lithography
    • D. G. Stearns, R. S. Rosen, and S. P. Vernon, "Multilayer mirror technology for soft x-ray projection lithography", Appl. Opt. 32, pp. 6952-6960, 1993.
    • (1993) Appl. Opt. , vol.32 , pp. 6952-6960
    • Stearns, D.G.1    Rosen, R.S.2    Vernon, S.P.3
  • 5
    • 0027847392 scopus 로고
    • Masked deposition techniques for achieving multilayer period variations required for short-wavelength (68-Å) soft-x-ray imaging optics
    • J. B. Kortright, E. M. Gullikson, and P. E. Denham, "Masked deposition techniques for achieving multilayer period variations required for short-wavelength (68-Å) soft-x-ray imaging optics", Appl. Opt. 32, pp. 6961-6968, 1993.
    • (1993) Appl. Opt. , vol.32 , pp. 6961-6968
    • Kortright, J.B.1    Gullikson, E.M.2    Denham, P.E.3
  • 6
    • 0000047681 scopus 로고    scopus 로고
    • Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region
    • C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pepin, and C. M. Falco, "Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region", Appl. Opt. 35, pp. 5134-5147, 1996.
    • (1996) Appl. Opt. , vol.35 , pp. 5134-5147
    • Montcalm, C.1    Kearney, P.A.2    Slaughter, J.M.3    Sullivan, B.T.4    Chaker, M.5    Pepin, H.6    Falco, C.M.7
  • 7
    • 84975534742 scopus 로고
    • Normal-incidence x-ray mirror for 7 nm
    • D. G. Stearns, R. S. Rosen, and S. P. Vernon, "Normal-incidence x-ray mirror for 7 nm", Opt. Lett. 16, pp. 1283-1285, 1991.
    • (1991) Opt. Lett. , vol.16 , pp. 1283-1285
    • Stearns, D.G.1    Rosen, R.S.2    Vernon, S.P.3
  • 8
    • 0004932883 scopus 로고
    • X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50 -30000 eV, Z = 1 -92
    • B. L. Henke, E. M. Gullikson, J. C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50 -30000 eV, Z = 1 -92", At. Data Nucl. Data Tables 54, pp. 181-342, 1993.
    • (1993) At. Data Nucl. Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 9
    • 84995720206 scopus 로고    scopus 로고
    • http://www-cxro.lbl.gov:80/multilayer/survey.html
  • 10
    • 0001726587 scopus 로고    scopus 로고
    • Improved analyzer multilayers for aluminium and boron detection with x-ray fluorescence
    • P. Ricardo, J. Wiesmann, C. Nowak, C. Michaelsen and R. Bormann, "Improved analyzer multilayers for aluminium and boron detection with x-ray fluorescence", Appl. Opt. 40, pp. 2747-2754, 2001.
    • (2001) Appl. Opt. , vol.40 , pp. 2747-2754
    • Ricardo, P.1    Wiesmann, J.2    Nowak, C.3    Michaelsen, C.4    Bormann, R.5
  • 12
    • 0010876831 scopus 로고    scopus 로고
    • Device and method for analyzing atomic and/or molecular elements by means of wavelength dispersive x-ray spectrometric devices
    • C. Michaelsen and R. Bormann, "Device and method for analyzing atomic and/or molecular elements by means of wavelength dispersive x-ray spectrometric devices", Pat. appl. WO 00/75646 A2.
    • Pat. Appl. WO 00/75646 A2.
    • Michaelsen, C.1    Bormann, R.2
  • 13
    • 0034296860 scopus 로고    scopus 로고
    • First observation of self-amplified spontaneous emission in a free-electron laser at 109 nm wavelength
    • J. Andruszkow et al., "First observation of self-amplified spontaneous emission in a free-electron laser at 109 nm wavelength", Phys. Rev. Lett. 85, pp. 3825-3829, 2000.
    • (2000) Phys. Rev. Lett. , vol.85 , pp. 3825-3829
    • Andruszkow, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.