Progress and profit through micro technologies. Commercial applications of MEMS / MOEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4560, Issue , 2001, Pages

  Ehrfeld, Wolfgang ^a   Ehrfeld, Ursula ^a  

^a Ehrfeld Mikrotechnik GmbH   (Germany)

Author keywords

Information technology; Life sciences; Mathematical modelling; Medical technology; Micro devices; Micro fabrication; Micro reactors; Micro technology market; Mobility

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; MATHEMATICAL MODELS; MICROOPTICS; OPTIMIZATION; SUSTAINABLE DEVELOPMENT; BIOMECHANICS; BIOTECHNOLOGY; FUEL CELLS; INFORMATION TECHNOLOGY;

MICRO TECHNOLOGIES; MICRO REACTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

1. W. Ehrfeld, U. Ehrfeld, St. Kiesewalter, "Progress and profit through micro technologies," MICRO. tec 2000, Vol. 1, pp. 9-17, VDE Verlag, Berlin, 2000.
2. "Mikrosystemtechnik 2000+", Bundesministerium fuer Bildung und Forschung (BMBF), Bonn, 2000.
3. R. Wechsung, N. Uenal, J.C. Eloy, H. Wicht, "Market analysis for micro systems 1996-2002," NEXUS Task Force Report, Berlin, 2000.
4. Advanced Microsystems for Automotive Applications 99, Eds. D.E. Ricken, W. Gessner, Springer Verlag; Berlin, Heidelberg, New York, 1999.
5. th edition, 1998.
6. Micro technologies & Miniaturisation: Tool, Techniques & Novel Applications for the Pharmaceutical Industry, Ed. IBC UK Conferences Limited. - London, 1997.
7. W. Ehrfeld, D. Münchmeyer, "Three-dimensional Micro fabrication using Synchrotron Radiation", Nuclear Instruments and Methods in Physics Research, A303, pp. 523-531, 1991.
8. M. Koehler, "Aetztechniken," Handbuch Mikrotechnik," W. Ehrfeld, Ed., Carl Hanser Verlag, Muenchen, 2001.
9. T.R. Dietrich, W. Ehrfeld, M. Lacher, M. Kraemer, B. Speit, "Fabrication technologies for microsystems utilizing fotoetchabte glass," Microelectronic Eng. 30, pp. 497-504, 1996.
10. M. Weck, "Ultraprecision machining of microcomponents," Precision Engineering and Micro technology, M. Weck Ed.,Verlag Riem, Voerde, 2000.
11. F. Michel, W. Ehrfeld, O. Koch, H.-P. Gruber, "EDM for micro fabrication - technology and applications," Precision Engineering and Micro technology, M. Weck Ed., Verlag Riem, Voerde, 2000.
12. A. Gillner, Th. Klotzbuecher, "Lasermikrobearbeitung," Handbuch Mikrotechnik," W. Ehrfeld, Ed., Carl Hanser Verlag, Muenchen, 2001 (in press).
13. A. Bertsch, P. Bernhard, C. Vogt, P. Renaud, "Rapid prototyping of small size objects," Rapid Prototyping Journal 6(4), pp. 259-266, 2000.
14. rd Int. Micro Materials Conference, B. Michel, T. Winkler, M. Werner, H. Fecht Eds., Verlag ddp goldenbogen, Dresden, 2000.
15. R. Brueck, St. Hardt, "Entwurf und Simulation von Mikrosystemen," Handbuch Mikrotechnik," W. Ehrfeld, Ed., Carl Hanser Verlag, Muenchen, 2001 (in press).
16. "Microtechnologies & Miniaturisation: Tool, Techniques & Novel Applications for the Pharmaceutical Industry," IBC UK Conferences Limited, London, 1997.
17. R. Konrad, H.-J. Hartmann, P. Jacob, R. Pommersheim, I. Sommer, M. Neumann, J. Wolfrum, "Durchlauf in Rekordzeit: Chip für die Hochdurchsatzanalyse von Biomolekülen,": BioTec 3, pp. 44-46, 1999.
18. H.-D. Bauer, W. Ehrfeld, J. Hossfeld, T. Paatzsch, "Micro-optical Components for Information Technology fabricated via LIGA Technique," NATO -Mediterranean Dialogue Advanced Research Workshop on Unconventional Optical Elements for Information Storage, Processing and Communications, pp. 64-68, North Atlantic Treaty Organization, Kiryat Anavim, 1998.
19. S. Krüger; W. Gessner, "Advanced Microsystems for Automotive Applications 2000," Springer Verlag, Berlin Heidelberg New York. 2000.
20. A.I. Stankiewicz, J.A. Moulijn, "Process Intensification: Transforming Chemical Engineering," Chemical Engineering Progress, pp. 22 - 33, January 2000.
21. W. Ehrfeld, V. Hessel, V. Haverkamp, "Microreactors," Ullmann's Encyclopedia of Industrial Chemistry, Sixth Ed., Electronic Release, Wiley/VCH, 1999.
22. th International Conference on Microreaction Technology (IMRET), W. Ehrfeld and M. Matlosz Eds., Springer Verlag, Berlin, Heidelberg, New York, 2001 (in press). For additional information, see also Conference Proceedings of IMRET 1-4.