Measurement of the dynamic deformation of a high frequency scanning mirror using a Shack-Hartmann wavefront sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 480-482

  Brown, Margaret ^a   Gong, Timothy ^a   Neal, Daniel R ^b,c   Roller, James ^b   Luanava, Selso ^a   Urey, Hakan ^a  

^a MICROVISION INC   (United States)

^b Wavefront sciences   (Mexico)

^c WaveFront Sciences Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; FINITE ELEMENT METHOD; INTERFEROMETERS; OPTICAL SENSORS; OPTIMIZATION; WAVEFRONTS;

SCANNING MIRROR; SHACK-HARTMANN WAVEFRONT SENSOR; STROBOSCOPIC INTERFEROMETER;

MIRRORS;

EID: 0035763048     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.453645     Document Type: Article

References (13)

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