Selection of calibration particles for scanning surface inspection systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 104-118

  Mulholland, George W ^a   Bryner, Nelson ^a   Liggett, Walter ^a   Scheer, Bradley W ^b   Goodall, Randal K ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b VLSI Research Inc   (United States)

^c International 300 mm Initiative ^*  (United States)

Author keywords

"real world" particles; Differential mobility analyzer; Electrical mobility; Light scattering intensity; Microcontamination; Monodisperse spheres; Polystyrene latex spheres; Wafer scanner; Width of size distribution

Indexed keywords

CALIBRATION; FLAT PANEL DISPLAYS; LIGHT SCATTERING; POLYSTYRENES; REFRACTIVE INDEX; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SIZE DISTRIBUTION; SPHERES; SUSPENSIONS (FLUIDS);

DIFFERENTIAL MOBILITY ANALYZERS; ELECTRICAL MOBILITY; LIGHT-SCATTERING INTENSITY; MICRO CONTAMINATIONS; MONODISPERSE SPHERES; POLYSTYRENE LATEX SPHERES; REAL-WORLD; WAFER SCANNER;

PARTICLE SIZE ANALYSIS;

EID: 0000910251     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256195     Document Type: Conference Paper

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