In-process monitoring of grinding and polishing of optical surfaces

Applied Optics

Volumn 39, Issue 19, 2000, Pages 3300-3303

  Van der Bijl, Robert Jaap M ^a   Fähnle, Oliver W ^b   Van Brug, Hedser ^c   Braat, Joseph J M ^c  

^a TNO   (Netherlands)

^b R+D FISBA OPTIK AG   (Switzerland)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; LIGHT SCATTERING; OPTICAL MICROSCOPY; POLISHING; ROUGHNESS MEASUREMENT;

TOTAL INTERNAL REFLECTION MICROSCOPY (TIRM);

OPTICAL VARIABLES MEASUREMENT;

EID: 0001488403     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.003300     Document Type: Article

References (2)

1. P. Temple, “Total internal reflection microscopy: a surface in spection technique,” Appl. Opt. 20, 2656-2664 (1981).
2. R. M. van der Bijl, O. W. Fahnle, and H. van Brug, “Subsurface damage measurements as a tool for process monitoring,” in Proceedings ofASPE 1999 Annual Meeting (American Society for Precision Engineering, Raleigh, NC, 1999), 606-609.