Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4440, Issue , 2001, Pages 51-58

  Jordan, Hans Joachim ^a   Brodmann, Rainer ^a   Grigat, Marcus ^a   Valentin, Juergen ^a  

^a NANOFOCUS AG   (Germany)

Author keywords

3D confocal microscopy; 3D topographic analysis; Automated 3D measuring system; Master replication comparison; Non contact 3D characterization

Indexed keywords

INTERFEROMETRY; OPTICAL FILTERS; OPTICAL MICROSCOPY; PHASE SHIFT; POLYMETHYL METHACRYLATES; PROCESS CONTROL; QUALITY ASSURANCE; SILICON; SURFACE MEASUREMENT; SURFACE STRUCTURE;

WHITE LIGHT MICROSCOPY;

OPTOELECTRONIC DEVICES;

EID: 0035760231     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448058     Document Type: Conference Paper

References (11)

1. Minsky M., Microscopy Apparatus, U.S. Patent 3013467 (19 Dec. 1961, filed 7 November 1957).
2. Minsky M., "Memoir on Inventing the Confocal Scanning Microscope", Scanning 10(4), 128-138, 1988.
3. Hamilton D.K., Wilson T., and Sheppard C.J.R., "Experimental observation of the depth-discrmination properties of scanning microscopes", Opt. Lett. 6 No 12, 625, 1981.
4. Wilson T., "Depth response of scanning microscopes", Optik 81 No 3, 113, 1989.
5. Hamilton D.K. and Wilson T., "Three-dimensional Surface Measurement using the confocal scanning microscope", Appl. Phys. B 27, 211, 1982.
6. Carlsson K. and Åslund N., "Confocal imaging for 3-D digital microscopy", Appl. Opt. 26 No 16, 3232, 1987.
7. Petran M., Hadravsky M., Egger M.D. and Galambos R., "Tandem-Scanning Reflected-Light Microscope", J. Opt. Soc. Am. 58(5), 661, 1968.
8. Jordan H.-J., Wegner M., and Tiziani H., "Optical topometry for roughness measurement and form analysis of engineering surfaces using confocal microscopy", Progress in Precision Engineering and Nanotechnology, Kunzmann H., Wäldele F., Wilkening G., Corbett J., McKeown P., Weck M., Hümmler J. (Eds.), Vol.1, 171-174, Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Braunschweig / Germany, 1997.
9. Jordan H.-J., Wegner M., and Tiziani H., "Highly accurate non-contact characterisation of engineering surfaces using confocal microscopy", Meas. Sci. Technol. 9, 1142-1151, 1998.
10. Wilson T., Confocal Microscopy, Academic Press, 1990.
11. Jordan H.-J., Brodmann R., "Highly accurate surface measurements by means of white light confocal microscopy", X. International Colloquium on Surfaces, Dietzsch M., Trumbold H. (Eds.), 296-301, Shaker Verlag, Aachen, 2000.