Application of digital holographic microscopy for inspection of micro-optical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4398, Issue , 2001, Pages 189-198

  Kebbel, Volker ^a   Hartmann, Hans Jürgen ^a   Jüptner, Werner P O ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Digital holography; Micro optical components; Microscopy

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; COMPUTER SIMULATION; DIGITAL IMAGE STORAGE; HOLOGRAMS; IMAGE RECONSTRUCTION; INTERFEROMETRY; MICROLENSES; NUMERICAL METHODS; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; WAVEFRONTS;

DIGITAL HOLOGRAPHIC MICROSCOPY;

HOLOGRAPHY;

EID: 0035758666     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445551     Document Type: Conference Paper

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