Digital micro-holo-interferometry for microstructure studies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4101, Issue , 2000, Pages

  Xu, Lei ^a   Peng, Xiaoyuan ^a   Miao, Jianmin ^a   Asundi, Anand K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; HOLOGRAMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NONDESTRUCTIVE EXAMINATION; OPTICAL PROPERTIES; SPATIAL VARIABLES MEASUREMENT; WAVEFORM ANALYSIS; WAVEFRONTS;

DIGITAL HOLOGRAPHY; DIGITAL MICRO-HOLO INTERFEROMETRY; INLINE CONFIGURATION; LONG DISTANCE MICROSCOPE; MICROMEASUREMENT; SILICON MICROBEAM; WAVEFRONT DIFFRACTION ANALYSIS;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0033712506     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)