Nonlinear mechanics of suspension beams for a micromachined gyroscope

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 270-273

  Davis, W O ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Gyroscope; MEMS; Nonlinear; Suspension

Indexed keywords

AXIAL DEFORMATIONS; BEAM DEFLECTION; NONLINEAR MECHANICS; SUSPENSION BEAMS;

CONTINUUM MECHANICS; FREQUENCY RESPONSE; GEOMETRY; GYROSCOPES; LINEARIZATION; MATHEMATICAL MODELS; MICROMACHINING; NONLINEAR SYSTEMS; SHEAR DEFORMATION;

MICROELECTROMECHANICAL DEVICES;

EID: 6344230197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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14. http://bsac.eecs.berkeley.edu/archive/wdavis