Optical profilometer with a standalone scanning sensor head

Optical Engineering

Volumn 40, Issue 12, 2001, Pages 2852-2859

  Bartoli, Alessandro ^a   Poggi, Pasquale ^a   Quercioli, Franco ^a   Tiribilli, Bruno ^a   Vassalli, Massimo ^a  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

Metrology; Nondestructive testing; Optical inspection; Optical systems; Optoelectronics; Optomechanical design; Profilometry; Sensors

Indexed keywords

ACTUATORS; COMPACT DISKS; OPTICAL SENSORS; OPTICAL SYSTEMS; PROFILOMETRY; REMOTE CONTROL; SCANNING;

SCANNING SENSOR HEADS;

OPTICAL INSTRUMENTS;

EID: 0035721301     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1417494     Document Type: Article

References (18)

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